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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Frontiers of Mechanical Engineering 2023, Volume 18, Issue 2, doi: 10.1007/s11465-023-0747-1

Abstract: However, attention has been rarely given on the influences of external mechanical and internal electricalIn this work, a bionic swallow structure design norm was developed for mechanical decoupling, and theinfluences of structural parameters on mechanical behavior were fully analyzed and optimized.High immunity to mechanical disturbances was maintained simultaneously, i.e., less than 0.369% and 0.058%

Keywords： micro-electro-mechanical system capacitive sensor     bionics     operation instability     mechanical and electrical    

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The Negative Electrostatic Spring Effect Analysis and Experimental Validation of Silicon Micromechanical Vibrating zaxis Gyroscope

Xia Dunzhu,Zhou Bailing,Wang Shourong

Strategic Study of CAE 2007, Volume 9, Issue 8,   Pages 66-68

Abstract: computing the relation between the resonant frequency and feedback force added on the sense mode of MEMS

Keywords： micromechanical z-axis gyroscope     negative electrostatic spring constant     feedback force generator     MEMS(microelectronic mechanical system)    

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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5,   Pages 801-809 doi: 10.1631/FITEE.2100236

Abstract: We propose an inductor-capacitor (LC) wireless passive , which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using . It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s). Moreover, the maximum error of the accelerometer was less than 0.037%.

Keywords： Bending structure surfaces     Flexible accelerometer     Micro-electro-mechanical system (MEMS) technology    

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Special issue: Micro-electromechanical systems (MEMS)

Zhuangde JIANG

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 457-458 doi: 10.1007/s11465-017-0492-4

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Research of MEMS and Development of One-chip RF - MEMS

Zhong Xianxin,Yu Wenge,Li Xiaoyi,Wu Zhengzhong,Liu Jixue,Chen Shuai,Shao Xiaoliang

Strategic Study of CAE 2004, Volume 6, Issue 7,   Pages 21-25

Abstract:

Micro-electro-mechanical integration system, called microsystem for short is one of forefront technologiesdevices, double the function density, information density and interlinkage density of apparatus and systemThe significance of MEMS and its basic theory are expounded in this paper.MEMS technology is one of the ultimate resolutions for one-chip wireless communication equipment isThe evolvement status about one-chip mechanical electronic integration microsystem for wireless communication

Keywords： microsystem     integration     one-chip     wireless communication system    

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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Additive direct-write microfabrication for MEMS: A review

Kwok Siong TEH

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 490-509 doi: 10.1007/s11465-017-0484-4

Abstract: barrier-of-entry—in terms of cost, time and training—for the prototyping and fabrication of MEMSachieve higher resolutions at the micrometer and nanometer length scales to be a viable technology for MEMSCompared to traditional MEMS processes that rely heavily on expensive equipment and time-consuming steps, enable faster design-to-product cycle, empower new paradigms in MEMS designs, and critically, encouragewider participation in MEMS research at institutions or for individuals with limited or no access to

Keywords： direct-write     additive manufacturing     microfabrication     MEMS    

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Review of MEMS differential scanning calorimetry for biomolecular study

Shifeng YU, Shuyu WANG, Ming LU, Lei ZUO

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 526-538 doi: 10.1007/s11465-017-0451-0

Abstract: We also introduce the recent advances of the development of micro-electro-mechanic-system (MEMS) based

Keywords： differential scanning calorimetry     biomolecule     MEMS     thermodynamic    

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Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Strategic Study of CAE 2002, Volume 4, Issue 6,   Pages 56-62

Abstract:

The packaging of micro electro mechanical systems (MEMS) is referred to first-level packaging andhigh importance not to forget packaging at the beginning of a project, when hoping to industrialize MEMS

Keywords： packaging of MEMS     bulk silicon bonding technology     film-sealed technology    

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MEMS-based thermoelectric infrared sensors: A review

Dehui XU, Yuelin WANG, Bin XIONG, Tie LI

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 557-566 doi: 10.1007/s11465-017-0441-2

Abstract:

In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensorsThis paper presents a review of MEMS-based thermoelectric IR sensors.

Keywords： thermoelectric infrared sensor     CMOS-MEMS     thermopile     micromachining     wafer-level package    

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System construction of a four-side primary permanent-magnet linear motor drive mechanical press

Jintao LIANG, Zhengfeng MING, Peida LI

Frontiers of Mechanical Engineering 2020, Volume 15, Issue 4,   Pages 600-609 doi: 10.1007/s11465-020-0597-z

Abstract: (PPMLM) has a robust secondary structure and high force density and is appropriate for direct-drive mechanicalThe entire press control system is constructed to realize various flexible forming processes.The control system scheme is determined in accordance with the mathematical model of PPMLM, and activeField-circuit coupling simulation is applied to estimate the system’s performance., a press prototype with 6 kN nominal force is fabricated, and the hardware platform of the control system

Keywords： mechanical press     direct drive     primary permanent-magnet linear motor (PPMLM)     servo system     active disturbance    

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Strategic Research on Disruptive Technologies in the Field of Mechanical and Vehicle Engineering

Yang Yanming, Zhao Yun, Shao Zhufeng, Li Daochun, Gao Zenggui, Zhang Zilong, Shen Yue, Wang Linjun

Strategic Study of CAE 2018, Volume 20, Issue 6,   Pages 27-33 doi: 10.15302/J-SSCAE-2018.06.005

Abstract: literature research and expert interviews, the existing or potential disruptive technologies in the field of mechanicalintelligent unmanned aerial vehicle technology, ultra-loop train technology, and electromechanical systems (MEMSFinally, the suggestions for the development of disruptive technologies in the field of mechanical and

Keywords： mechanical and vehicle engineering     disruptive technologies     bionic intelligent technology     shaftlesspropulsion technology     intelligent unmanned aerial vehicle technology     ultra-loop train technology     MEMS    

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combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS

Ming-jun MA,Zhong-he JIN,Hui-jie ZHU

Frontiers of Information Technology & Electronic Engineering 2015, Volume 16, Issue 6,   Pages 497-510 doi: 10.1631/FITEE.1400349

Abstract: The bias drift of a micro-electro-mechanical systems (MEMS) accelerometer suffers from the 1/ noise

Keywords： Bias drift     Closed-loop MEMS accelerometer     Modulated feedback approach     Temperature compensation    

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Effect of mineral additives and permeability reducing admixtures having different action mechanisms on mechanical

Frontiers of Structural and Civil Engineering 2021, Volume 15, Issue 5,   Pages 1277-1291 doi: 10.1007/s11709-021-1752-2

Abstract: In this paper, the effect of usage of the permeability reducing admixture (PRA) having different action mechanisms on hardened state properties of cementitious systems containing mineral additives is examined. For this aim, three commercial PRAs were used during investigation. The effective parameters in the first and third PRAs were air-entraining and high-rate air-entraining, respectively. The second one contained the insoluble calcium carbonate residue and had a small amount of the air-entraining property. Mortar mixes with binary and ternary cementitious systems were prepared by partially replacing cement with fly ash and metakaolin. The hardened state properties of mortar mixtures such as compressive strength, ultrasonic pulse velocity, water absorption, drying shrinkage and freeze–thaw resistance were investigated. The ternary cement-based mixture having both fly ash and metakaolin was selected as the most successful mineral-additive bearing mix in regard to hardened state properties. In this sense, PRA-B, with both insoluble residues and a small amount of air-entraining properties, showed the best performance among the mixtures containing PRA. The combined use of mineral additive and PRA had a more positive effect on the properties of the mixes.

Keywords： cementitious system     mineral additive     permeability reducing admixture     mechanical properties     durability    

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Development and application of high-end aerospace MEMS

Weizheng YUAN

Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4,   Pages 567-573 doi: 10.1007/s11465-017-0424-3

Abstract: paper introduces the design and manufacturing technology of aerospace microelectromechanical systems (MEMSMoreover, several kinds of special MEMS devices with high precision, high reliability, and environmental

Keywords： MEMS     design and manufacture technology     aeronautic and aerospace    

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Title Author Date Type Operation

A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow

Journal Article

The Negative Electrostatic Spring Effect Analysis and Experimental Validation of Silicon Micromechanical Vibrating zaxis Gyroscope

Xia Dunzhu,Zhou Bailing,Wang Shourong

Journal Article

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Journal Article

Special issue: Micro-electromechanical systems (MEMS)

Zhuangde JIANG

Journal Article

Research of MEMS and Development of One-chip RF - MEMS

Zhong Xianxin,Yu Wenge,Li Xiaoyi,Wu Zhengzhong,Liu Jixue,Chen Shuai,Shao Xiaoliang

Journal Article

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

Additive direct-write microfabrication for MEMS: A review

Kwok Siong TEH

Journal Article

Review of MEMS differential scanning calorimetry for biomolecular study

Shifeng YU, Shuyu WANG, Ming LU, Lei ZUO

Journal Article

Packaging of Micro Electro Mechanical Systems Based on Bulk Silicon Bonding and Film Sealed Technology

Wang Weiyuan,Wang Yuelin

Journal Article

MEMS-based thermoelectric infrared sensors: A review

Dehui XU, Yuelin WANG, Bin XIONG, Tie LI

Journal Article

System construction of a four-side primary permanent-magnet linear motor drive mechanical press

Jintao LIANG, Zhengfeng MING, Peida LI

Journal Article

Strategic Research on Disruptive Technologies in the Field of Mechanical and Vehicle Engineering

Yang Yanming, Zhao Yun, Shao Zhufeng, Li Daochun, Gao Zenggui, Zhang Zilong, Shen Yue, Wang Linjun

Journal Article

combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS

Ming-jun MA,Zhong-he JIN,Hui-jie ZHU

Journal Article

Effect of mineral additives and permeability reducing admixtures having different action mechanisms on mechanical

Journal Article

Development and application of high-end aerospace MEMS

Weizheng YUAN

Journal Article